INTRODUCTION TO SEMICONDUCTOR DEVICE YIELD MODELING AUTHOR:
Albert V. F e r r i s - P r a b h u
ARTECH HOUSE INC. 685 Canton Street Norwood, MA 02062 U.S.A.
(ISBN: 0-89006-450-4) Published in 1992 There are basically two ways of increasing the level of integration of i n t e g r a t e d circuits: down-scaling of the device dimensions, so t h a t more devices can be fitted in t h e same active area on the chip, and increasing of the active a r e a on the chip. Down-scaling has been far more attractive as it increases the speed of the circuit at t h e same time, but, it becomes very difficult to deal with down-scaling limitations. As we are forced to more frequently a t t e m p t the second approach, more i m p o r t a n t will become the limitation to this approach, which is yield reduction. It is increasingly i m p o r t a n t to u n d e r s t a n d what is limiting the integrated circuit yield. Mathemai,ical models used to express the yield-associated phenomena are undoubtedly very import a n t when dealing with the yield. This is one of rare books on yield modelling. If you wander w h a t is behind the title I n t r o d u c t i o n to S e m i c o n d u c t o r D e v i c e Y i e l d M o d e l i n g by A.V. F e r r i s - P r a b h u , you may get a good idea from the list of the c h a p t e r s titles: 1. Yield; 2. F a u l t Probability; 3. Effect of Defect Sizes on F a u l t Probability; 4. Counting Techniques; 5. Yield Equations; 6. Defect Density and Scaling Rules; 7. Yield Prediction; 8. Yield With Redundancy; 9. A Yield Comparison; and 10. Productivity. These ten c h a p t e r s are divided into 70 sections in total. If you notice t h a t t h e book has 90 pages (10 pages per chapter, or 1.3 pages per section) you can get a fairly good idea to a w h a t level are the above-listed ten topics considered. The a u t h o r states t h a t the purpose of the book "is to provide an introduction to yield prediction for new practitioners of the art". The book can be very useful for those who want to get introduced to the yield modeling, with a good t h i n g t h a t it is a quick introduction as it does not take long to read 10 pages per topic. It can excellently serve postgraduate students and others aimed to an inventive work, who can quickly find an unsolved problem in yield modeling t h a t suits them. Reading the book, it does not take long to notice that, for example, the following i m p o r t a n t aspect of yield modeling should be investigated: parametric yield models, application of yield models to yield control, design improvement, cost optimisation, etc. The a u t h o r ' s words t h a t the book is an "introductory overview" m e a n exa,:tly that. This book is not for those who are after a comprehensive overview of t h e w ~rk done in the yield modelling, as there is a large n u m b e r of yield modeling relaced publications which do not even appear in the list of references.
S. Dimitrijev and N. Stojadinovi~